Electronic speckle shearing interferometry based on use of fine-structured refracting optical elements for splitting the wave from the test object into two phase shifted waves, with only minimal adjustment required

摘要

Method for deformation or oscillation measurement using electronic speckle shearing interferometry uses a fine structure refracting optical element, that splits the wave coming from a test object into two phase shifted waves. The shearing element is placed between camera objective and test object. The shearing element comprises at least two groups of fine structures that deflect the object wave through a certain angle. An independent claim is made for an optical arrangement for carrying out speckle shearing interferometry.