发明名称 |
Production of tubular micromechanical component, e.g. stents, comprises coating a tube with a photolacquer, forming a pattern, simultaneously inserting figures, removing the exposed regions and etching the tube |
摘要 |
Production of tubular micromechanical components, comprises: (i) coating a tube with a photolacquer; (ii) forming a pattern on the outer surface of the tube; (iii) simultaneously inserting figures; (iv) removing the exposed regions of the pattern; (v) providing the inside of the tube with an etch-resistant material; and (vi) etching the prepared tube. Production of tubular micromechanical components, comprises: (i) coating a tube with a photolacquer; (ii) forming a pattern on the outer surface of the tube using photolithography; (iii) simultaneously inserting figures in an exposure step; (iv) removing the exposed regions of the pattern which correspond to later openings; (v) providing the inside of the tube with an etch-resistant passivating material; and (vi) etching the prepared tube. The step of providing the tube with an etch-resistant passivating material is carried out before or after the step of coating the tube with a photolacquer. An Independent claim is also included for an apparatus for carrying out the process, comprising: (a) an exposure device (7) for exposing a pattern (6) to the photolacquer (4) of the tube (2); (b) a holder for holding the tube in a defined position relative to the exposure device; and (c) an etching device for etching the prepared tube.
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申请公布号 |
DE10007425(A1) |
申请公布日期 |
2001.09.06 |
申请号 |
DE2000107425 |
申请日期 |
2000.02.18 |
申请人 |
FRAUNHOFER-GESELLSCHAFT ZUR FOERDERUNG DER ANGEWANDTEN FORSCHUNG E.V. |
发明人 |
DAAUD, SIMONE;LUETHJE, HOLGER;HERTLEIN, GUENTHER |
分类号 |
A61F2/06;A61F2/90;B21C37/06;(IPC1-7):B81C5/00;A61F2/04;A61M29/00 |
主分类号 |
A61F2/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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