Low-coherence interferometry device has short coherence interferometer with scanning objective and beam splitter moved in synchronism during depth scanning of object

摘要

The interferometry device uses a short coherence interferometer with a beam splitter (8) positioned transverse to the scanning direction (25) between the light source (7), the detector (10) and a reference mirror (9) and the measuring opening (12), with a movable scanning objective (11) between the beam splitter and the measuring opening. The scanning objective and the beam splitter are moved in synchronism during the depth scanning of the object (13).