| 摘要 |
PURPOSE: A fine jet system is provided to form an adaptable fine jet system according to a model and a cutting side of a substrate by changing a structure of fine jet system. CONSTITUTION: A rail(50) is formed vertically to a side support portion. A bracket(52) is passed through the rail(50). A fine jet(54) is supported by the bracket(52). The bracket(52) is moved on the rail(50) in order to shift the pine jet(54). The rail(50) passes through the bracket(52). The first screw(64) is inserted into the first tapping hole(70) and the bracket(52) is fixed on the rail(50) when the rail(50) passes through the bracket(52). The arm(58) is inserted into the second insertion hole(57). The second and the third screws(66,68) are inserted into the second and the third tapping holes(72,74) to fix the arm(58) when the arm(58) is inserted into the second insertion hole(57).
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