| 摘要 |
PURPOSE: A dry cleaning inline carrier system is provided to reduce a processing time by performing a dry cleaning process within inline equipment without using a cassette and a robot. CONSTITUTION: A plurality of stopper pin(30,42) stops substrates(60,62) provided from a conveyer. A plurality of door(32,52) intercepts a chamber(100) from outer air when performing a dry cleaning process for the substrates(60,62). A plurality of sensor(34,40) for sensing the substrates(60,62) is formed in an inline shape. A UV(UltraViolet) lamp(48) irradiates an ultraviolet ray. The UV lamp(48) is formed on a UV lamp house(46). A quartz window(50) is used for passing through the ultraviolet ray of particular wavelengths. An up/down pin(36) maintains a predetermined height between the substrate(60,62) and the UV lamp(48). A drive portion(38) drives the up/down pin(36).
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