| 摘要 |
PURPOSE: A method for controlling an operation of an AGV(Automatic Guided Vehicle) system is provided to prevent a damage of a wafer by correcting properly an error command transmitted from a host computer. CONSTITUTION: A plurality of cassette bay is transferred to a bay by a conveyer.(S10) A host computer searches information of the cassettes and transmits a system ID, a port ID, and a cassette stage number to an AGV.(S20) The AGV transfers the cassette to a corresponding system.(S30) The AGV confirms the system ID, the port ID, and the cassette stage number.(S40) The confirmed information is compared with the information transmitted from the host computer.(S50) An error message is generated if the confirmed information does not correspond to the information transmitted from the host computer.(S80) The error is corrected.(S90) The cassette is loaded on a corresponding system if the confirmed information corresponds to the information transmitted from the host computer.(S60) A result is reported to the host computer(S70).
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