CONTROL SYSTEM OF SEMICONDUCTOR EQUIPMENT

摘要

PURPOSE: A control system of semiconductor equipment is provided to maintain continuously a normal operation by installing a main controller and a sub controller to semiconductor equipment. CONSTITUTION: A main controller(11) and a sub controller(13) are installed to semiconductor equipment(20). The main controller(11) controls the semiconductor equipment(20) to perform a wafer process when the main controller(11) is normally operated. The sub controller(13) controls the semiconductor equipment(20) to perform continuously the wafer process when the main controller(11) is abnormally operated by a CPU fault or a malfunction of a CPU. The sub controller(13) is switched to the main controller(11) and the main controller(11) controls the semiconductor equipment(20) when a fault of the main controller(11) is corrected.