发明名称 Semiconductor component with passivation
摘要 A semiconductor component with passivation includes at least two double passivating layers, of which an uppermost is applied to a planar surface of a layer located therebelow. The double passivating layers include two layers of different dielectric materials, for example silicon oxide and silicon nitride. The respective thicknesses of the individual passivating layers can be adapted to dimensions of the structuring of the layer to which the passivation is applied. This produces a reliable passivation which is particularly suitable for capacitively measuring fingerprint sensors.
申请公布号 US2001019168(A1) 申请公布日期 2001.09.06
申请号 US20010757328 申请日期 2001.01.09
申请人 WILLER JOSEF;BASSE PAUL-WERNER VON;SCHEITER THOMAS 发明人 WILLER JOSEF;BASSE PAUL-WERNER VON;SCHEITER THOMAS
分类号 A61B5/117;G06K9/00;G06T1/00;H01L21/312;H01L21/314;H01L29/94;(IPC1-7):H01L29/82;H01L23/58 主分类号 A61B5/117
代理机构 代理人
主权项
地址