APPARATUS FOR MIXING CHEMICALS

摘要

PURPOSE: Provided is an apparatus for mixing chemicals which is characterized by enhancing the mixing uniformity of chemicals used at a manufacturing process of semiconductor device by circulating among many mixing vessels. CONSTITUTION: The apparatus is composed of the following parts in draw 1: a first vessel (100) and a second vessel (200) to mix chemical A and B; inlets (110 and 110') for chemical A and B equipped at the first vessel (100); inlets (120 and 220) for an inert gas (ie. N2) equipped at the first vessel and the second vessel, respectively; a connection pipe (130) with the diameter of 30% of the mixing vessel diameter between the mixing vessels; and a mixer (140) shaped like a stirrer on the connection pipe (130).