Production of components of a drop generator comprises cutting, etching or shaping recesses lying parallel to each other in a wafer, forming groups of recesses, and etching groups

摘要

Production of components of a drop generator comprises; (i) cutting, etching or shaping a number of recesses lying parallel to each other in a wafer made from silicon, metal, glass, ceramic or micro-injection molded plastic; (ii) forming groups of recesses; and (iii) etching groups of recesses in pairs outside for a shorter or longer period than inside. An Independent claim is also included for a drop generator comprising; (i) a base plate (14) made from silicon, metal, glass, ceramic or micro-injection molded plastic with one or more nozzles (12); (ii) a frame plate (13) with recesses (9); and (iii) bending contacts (6) connected to piezo-actuators.