发明名称 |
Preventive maintenance apparatus for CMP top-ring's backing-film and the method thereof |
摘要 |
A preventive maintenance method and apparatus for quickly and precisely replacing a backing-film of a CMP machine is provided. In comparison with a conventional backing-film, the backing-film according to the present invention is pre-drilled by laser in order to bypass the restriction set by a conventional manual drilling process on the backing-film. In addition, a PM apparatus for the backing-film comprises an aligning panel having a plural first pins in order to quickly check whether drilled holes of the backing-film are aligned with the corresponding air holes or not. Therefore, the CMP machine down time due to the PM can be reduced.
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申请公布号 |
US2001018790(A1) |
申请公布日期 |
2001.09.06 |
申请号 |
US20010853808 |
申请日期 |
2001.05.11 |
申请人 |
WINBOND ELECTRONICS CORP. |
发明人 |
CHEN TING-KOU;LIAO YONG-SEN;CHANG FRANK J.C. |
分类号 |
B24B37/04;H01L21/306;(IPC1-7):B23P6/00 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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