| 摘要 |
PURPOSE: A frost generation preventing device is to improve workability and accomplish clean work environment by introducing external air into a space portion and discharging the introduced air to exterior again to prevent generation of frost in a supply line. CONSTITUTION: A liquid nitrogen stored in a closed container is supplied through a supply line(3) and divided at a predetermined point. Then, the liquid nitrogen is supplied to each chamber of a handler along the divided supply line. A main solenoid valve(4) is arranged at a closed container side in front part of the dividing point while an auxiliary solenoid valve(5) is arranged at the chamber side in rear part of the dividing point. A dry air layer forming unit is provided in a section between the auxiliary solenoid valve and a bending point in the part from the dividing point in the supply line to envelope the supply line and form a dry air layer. A lagging substance(105) is provided at a section including the bending point in the supply line to enclose the supply line and change its shape arbitrarily.
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