Optical element holding and extraction device

摘要

An optical element holding and extraction device (408) is provided. The device includes an optical element (416), an optical element holder (422) having a tubular gripping portion (418) and a tubular extraction portion (419) connected at one end to the tubular gripping portion (418), and a retainer (310) that is slideably carried on the tubular extraction portion (419). The diameter of the tubular extraction portion (419) is less than the tubular gripping portion (418). In addition, the tubular gripping portion (418) grips the peripheral edge of the optical element (416). The device may be used in a variety of gas lasers, including excimer lasers.