| 发明名称 |
Polymer and photoresist compositions |
| 摘要 |
<p>Disclosed are polymers containing as polymerized units one or more cyclic olefin monomers having fused cyclic electron withdrawing groups, methods of preparing such polymers, photoresist compositions including such polymers as resin binders and methods of forming relief images using such photoresist compositions.</p> |
| 申请公布号 |
EP1130468(A2) |
申请公布日期 |
2001.09.05 |
| 申请号 |
EP20010301622 |
申请日期 |
2001.02.22 |
| 申请人 |
SHIPLEY COMPANY LLC |
发明人 |
BARCLAY, GEORGE G.;ZAMPINI, ANTHONY |
| 分类号 |
G03F7/027;C08F4/34;C08F4/80;C08F32/08;C08F232/08;G03F7/004;G03F7/039;H01L21/027;(IPC1-7):G03F7/004;C08F32/00 |
主分类号 |
G03F7/027 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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