Micromachined filters

摘要

The fluid filters are capable of accurately handling substantially continuous fluid flow rates as low as about 0.01 cc/day. The filters are so miniaturized, corrosion-resistant and non-toxic that they are suitable for being implanted in the human body; and are capable of being mass produced at costs so low, by using micromachining techniques, such as etching, that they may be considered to be disposable. The filters are passive devices which consume no electrical energy at all. The filters are reliable because they may have as few as only two parts, only one which is a moving part; and because they may handle fluids at very low pressures