| 摘要 |
<p>In a first embodiment of an optical switch (10 having at least one dual axis micromirror (22, 26 and 28; 50; and 90), the micromirror is manipulated about two generally perpendicular axes by varying voltage patterns along two electrostatic arrangements. The two electrostatic arrangements may be formed to independently drive two movers (76 and 78; 96 and 98), or may be formed to control a mover that is displaceable in two directions. The micromirrors and the movers that control the micromirrors may be integrated onto a single substrate (92). Alternatively, the micromirrors may be formed on a substrate (52) that is attached to the substrate (64) that includes the mover or movers. In a second embodiment of an optical switch in accordance with the invention, the switch includes two collimator arrays (12 and 14) and two dual axis micromirror arrays (16 and 18). Each first micromirror in the first micromirror array is dedicated to one of the collimators in the first collimator array. Similarly, each second micromirror of the second micromirror array is dedicated to one of the collimators of the second collimator array. By manipulating a first micromirror, an input signal from the associated first collimator can be reflected to any of the second micromirrors. By manipulating the second micromirror that receives the signal, the signal can be precisely positioned on the second collimator that is associated with the second micromirror.</p> |
