| 发明名称 |
Coil and coil support for generating a plasma |
| 摘要 |
<p>A coil (104) has an integral fastener portion (500) to facilitate fastening the coil to a shield wall (140) to reduce generation of particulates. <IMAGE></p> |
| 申请公布号 |
EP1130624(A2) |
申请公布日期 |
2001.09.05 |
| 申请号 |
EP20010301685 |
申请日期 |
2001.02.23 |
| 申请人 |
US |
发明人 |
US;US;US;US;US;US |
| 分类号 |
H05H1/46;C23C14/34;H01J37/32;H01L21/203;H01L21/205;(IPC1-7):H01J37/32 |
主分类号 |
H05H1/46 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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