发明名称 MICRO-LENS MOLDING MOLD AND METHOD FOR PRODUCING MICRO- LENS SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a micro-lens molding mold which can form a micro-lens of a thin thickness, can reduce dispersion in thickness, is resistant to breakage and high in durability, and has an improved precision molding surface shape and to provide a method for producing a thin precision micro-lens in a high yield by using the molding mold high in durability and shape precision. SOLUTION: A heater 50 is arranged on the back a silicon substrate 10 in which recessed parts are formed, and the silicon substrate 10 is fitted to a support substrate 13 by anode joining with the heater 50 housed in the housing recessed part 13b of the support substrate 13.
申请公布号 JP2001239523(A) 申请公布日期 2001.09.04
申请号 JP20000055869 申请日期 2000.03.01
申请人 SEIKO EPSON CORP 发明人 SAITO HIROMI;YOTSUYA SHINICHI
分类号 B29C33/02;B29C33/38;(IPC1-7):B29C33/02 主分类号 B29C33/02
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