PACKED HIGH PURITY TARGET

摘要

PROBLEM TO BE SOLVED: To provide a packed high purity target in which neither stability nor long service life when starting the use in sputtering is degraded even when the target is stored and carried in a packed condition and taken out of the pack and used in sputtering. SOLUTION: The high purity target is packed by using a film having a surface on which no releasable particles of not less than 2.0μm are present on at least one side of the film with a face side thereof on the high purity target side.