TREATMENT METHOD AND TREATING LIQUID FOR SOLID SURFACE AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE USING THE SAME

摘要

PROBLEM TO BE SOLVED: To etch and melt noble metals represented by ruthenium, within a practicably usable time range. SOLUTION: An oxidizing agent having a sufficiently higher oxidation reduction potential as compared to the metal to be treated is used and the reaction with the oxygen atoms released from this oxidizing agent is utilized in the process of reaction.