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发明名称
摘要
申请公布号
JP3204735(B2)
申请公布日期
2001.09.04
申请号
JP19920140425
申请日期
1992.06.01
申请人
发明人
分类号
H01L29/78;H01L21/205;H01L21/31;H01L21/336;H01L29/786;(IPC1-7):H01L29/786
主分类号
H01L29/78
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