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发明名称
摘要
申请公布号
JP3205985(B2)
申请公布日期
2001.09.04
申请号
JP19980264130
申请日期
1998.09.18
申请人
发明人
分类号
H01L29/78;H01L21/223;H01L21/265;H01L21/336;(IPC1-7):H01L21/265
主分类号
H01L29/78
代理机构
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