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发明名称
摘要
申请公布号
JP3205646(B2)
申请公布日期
2001.09.04
申请号
JP19930162264
申请日期
1993.06.30
申请人
发明人
分类号
C30B15/02;C30B29/22;H01L39/12;(IPC1-7):C30B29/22
主分类号
C30B15/02
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