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发明名称
Penning vacuum meter
摘要
The invention relates to a Penning vacuum meter (1), comprising a cathode and an anode. According to the invention, the cathode (11) consists at least mainly of titanium in order to avoid the detrimental effects of the cathode disintegrating.
申请公布号
US6285192(B1)
申请公布日期
2001.09.04
申请号
US19990403193
申请日期
1999.10.14
申请人
LEYBOLD VAKUUM GMBH
发明人
BLEY WERNER GROSSE;KUSTER GERHARD
分类号
G01L21/34;H01J41/04;H01J41/06;(IPC1-7):G01L21/30;G01N27/62;H01J1/48
主分类号
G01L21/34
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地址
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