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发明名称
摘要
申请公布号	JP3204284(B2)	申请公布日期	2001.09.04
申请号	JP19930307270	申请日期	1993.11.13
申请人		发明人
分类号	F26B5/08;F26B11/08;H01L21/304;(IPC1-7):H01L21/304	主分类号	F26B5/08
代理机构		代理人
主权项
地址

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