| 摘要 |
<p>PROBLEM TO BE SOLVED: To prevent a pretreatment effect from deteriorating when pretreating a base material with low electric conductivity in the fluid layer of diamond particles in the process of forming a diamond film on the base material. SOLUTION: In the process of pretreating the base material in the fluid layer of diamond particles, static electricity in the base material is kept in the range of -1.5-+1.5 kV, relative humidity in the fluid gas of diamond particles is controlled to 40% RH or more, electric charge in the base material is preferably neutralized with beaming ion on the surface, and/or the fluid gas is humidified by using a water bubbling equipment of a water spray equipment.</p> |
