| 摘要 |
PROBLEM TO BE SOLVED: To provide a single crystal fluoride, in high yielding percentage, which is used as optical materials suitable to such high energy light as ArF excimer laser and is high in purity and superior in optical uniformity. SOLUTION: When manufacturing single crystal fluoride, there are two processes involved. The refining process where the raw material of single crystal fluoride is refined by being exposed to a fluorine containing gas and impurities in the raw material are reacted to the fluorine containing gas, and the growth process where single crystal is grown from the refined raw material of single crystal fluoride. The refined process and the growth process are undertaken in a same container, and the both processes are undertaken continuously.
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