| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma resistance material which shows such performances as high resistance against plasma, low dielectric loss, high intensity, long life of products therefrom, and high reliability. SOLUTION: On the surface of a substrate 11 composed of a silicon nitride type sinter, an anti-corrosion surface layer 13 composed of at least on of fluoride, oxide or nitride of a metal is formed via a medium layer 12 composed of SiO2 or a compound oxide of an element in No.3a group of the periodic table and silicon. |
