Resonant circuit having a resonant body mechanically oscillated by electrostatic or magnetic forces

摘要

The resonant circuit has at least one resonant body of a semiconductor material anchored on the surface of a semiconductor substrate, at least one first electrode being arranged at said semiconductor material, and at least one second electrode. The first and second electrode are arranged lying opposite one another. When an AC-superimposed DC voltage is applied between the first and the second electrode, the resonant body is excited to mechanical oscillation by the DC voltage. In particular, the resonant circuit can be monoically integrated in electronic circuits.