| 摘要 |
Provided is a system for controlled vaporization of a liquid chemical. The system includes: (a) an evaporation vessel connected to receive a liquid chemical which is carrier gas free; (b) a mechanism for maintaining the liquid chemical in the evaporation vessel at a substantially constant level; and (c) a mechanism for controlling the temperature of the liquid chemical in the evaporation vessel to a desired value, the controlling mechanism including: (I) a system for cooling the liquid chemical, and (II) a heater inside the evaporation vessel for heating the liquid chemical. Also provided, are methods of controlled delivery of a vaporized liquid chemical. The above systems and methods are particularly applicable to the semiconductor manufacturing industry.
|
