发明名称 GRINDING LIQUID
摘要 <p>PROBLEM TO BE SOLVED: To secure a good grinding property by suppressing the solidification of a grinding obtained by dispersing a grinding material in an aqueous in an aqueous solution, cased by coagulation and gelation with time, for improving its handling property. SOLUTION: In this grinding liquid 16 consisting of a grinding material and an aqueous solution, and used for grinding a material to be ground 5, a water to be used has <=0.500μS/cm (at 25 deg.C) electric conductivity and the content of polyvalent ions is reduced, etc. to suppress coagulation.</p>
申请公布号 JP2001240849(A) 申请公布日期 2001.09.04
申请号 JP20000050765 申请日期 2000.02.28
申请人 FUJI PHOTO FILM CO LTD 发明人 RYOMO KATSUMI
分类号 B24B19/00;B24B37/00;C09K3/14;G02B6/36;H01L21/304;(IPC1-7):C09K3/14 主分类号 B24B19/00
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