发明名称 Diaphragm-support disc for a polishing machine and method of operating a polishing machine
摘要 A diaphragm-support disc for a polishing machine of the type in which a work piece to be polished is sandwiched between a radial front face of a diaphragm and a polishing surface or cloth. The diaphragm is extended across and wrapped around the peripheral edge of a radial front face of the disc, and a radial rear face of the diaphragm is subjected to pressure from a fluid. The diaphragm-support disc includes a main annular part that projects from the radial front face of the disc and is located in a peripheral region of the radial front face of the disc a predetermined distance from the peripheral edge of the radial front face of the disc. The main annular part can act on the work piece through the diaphragm so as to press the work piece onto the polishing surface or cloth by an axial displacement of the disc with respect to the polishing surface or cloth. In a preferred embodiment, a shorter secondary annular part projects from the radial front face of the disc on the peripheral edge of the radial front face of the disc some distance from the main annular part. A method of operating a polishing machine to polish a work piece is also provided.
申请公布号 US6283834(B1) 申请公布日期 2001.09.04
申请号 US19990304314 申请日期 1999.05.03
申请人 STMICROELECTRONICS S.A. 发明人 LIAUZU LUC
分类号 B24B37/04;B24B37/30;B24B41/06;(IPC1-7):B24B1/00 主分类号 B24B37/04
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