METHOD FOR FABRICATING POROUS SURFACE PROTECTING LAYER OF GAS SENSOR

摘要

PURPOSE: A method for fabricating a porous surface protecting layer of a gas sensor is provided to be usefully used for warning and detecting the leakage of a methane gas for home and various industries by forming a porous surface protecting layer on a sensing film surface of the gas sensor and improving a gas selectivity of the gas sensor. CONSTITUTION: A sol solution is fabricated using a sol-method, and then the sol solution is poured into a vessel to which an ultrasonic vibrator with 1.5MHz is attached for generating an aerosol(S10). The aerosol is conveyed from an aerosol generating device to a torch by a conveying gas such as an argon or a nitrogen, and an organic composition, solvent, and water of the aerosol is spread or evaporated when the aerosol passes the flame of the torch(S20). A porous surface protecting layer is deposited, and the deposited porous surface protecting layer is processed by heat in a range of 500-1000 deg.C(S30).