METHOD FOR APPLYING RADIO FREQUENCY POWER IN CLEANING PROCESS OF EVAPORATION EQUIPMENT

摘要

PURPOSE: A method for applying radio frequency power in a cleaning process of evaporation equipment is provided to reduce process errors and to improve manufacturing yield, by securely performing a cleaning process. CONSTITUTION: Radio frequency power is applied to a pedestal part in an upper portion of an electrostatic chuck which electronically performs a chucking in a cleaning process, so that a difference of an etch rate is minimized in the cleaning process. The pedestal part is installed in an upper portion of a quartz insulator placed on the chuck.