METHOD AND APPARATUS FOR PREVENTING WARP OF CLAMP RING USED FOR WAFER COATING APPARATUS,申请号KR1020007009870-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR PREVENTING WARP OF CLAMP RING USED FOR WAFER COATING APPARATUS
摘要
申请公布号	KR20010083782(A)	申请公布日期	2001.09.01
申请号	KR1020007009870	申请日期	2000.09.06
申请人		发明人
分类号	H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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