| 摘要 |
PURPOSE: A thermopile sensor is provided to increase the efficiency of using infrared energy by using polymer-based material having a low heat conduction coefficient, and to minimize damage by reflection of incident energy by forming an anti-reflecting coating layer on a membrane. CONSTITUTION: A via hole is formed in the center of a substrate. A membrane is formed on the substrate. Thermopiles are formed in a predetermined region on the membrane. A black body is formed on the thermopiles. An anti-reflecting coating layer is formed in the membrane.
|
