| 摘要 |
PROBLEM TO BE SOLVED: To provide pore size distribution measuring instrument capable of accurately measuring the sizes of pores ranging from a meso-pore to a micropore provided in an object to be inspected and the distribution state of them without using an expensive apparatus, and collapsing the shape of the object to be inspected. SOLUTION: The pore size distribution measuring instrument is equipped with a holding means 3 for holding the object 5 to be inspected having pores so that one ends of the pores communicate with a primary chamber 2 and the other ends of them communicate with a secondary chamber 3, an inspection gas supply means 7 for supplying inspection gas mixed with non-condensible gas and condensible gas to primary chamber 2, the regulation means 14, 16 provided in the inspection gas supply means 7 and regulating the mixing ratio of the non-condensible and condensible gases supplied to the primary chamber 2, and the measuring means 40 connected to the secondary chamber 3 and measuring the amount of the inspection gas passed through the object 5 to be inspected with the elapse of time.
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