| 摘要 |
PROBLEM TO BE SOLVED: To provide an angular acceleration sensor by which an angular acceleration can be detected precisely even when it is miniaturized. SOLUTION: The angular acceleration sensor 10 comprises a structure 11 which comprises a ring-shaped flow passage 110. The sensor 10 comprises a working fluid 12 which is sealed in the flow passage 110 and which is moved by an angular acceleration applied to the structure 11. the sensor 10 comprises a flow velocity sensor 13 which is installed on a face 113a along the movement direction of the working fluid 12. Consequently, the sensor in accordance with this invention detects the movement of the working fluid by using thermal energy, the kinetic energy of the working fluid is not reduced, the very small movement of the working fluid can be detected, and the angular velocity can be detected precisely. In the sensor in accordance with this invention, the flow velocity sensor is installed on the face along the movement direction of the working fluid, the flow or the working fluid is not disturbed by the flow velocity sensor, the working fluid can be moved even when a very small angular acceleration is given, and the angular acceleration can be detected precisely.
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