| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a high-response focusing adjustment by avoiding hysteresis associated with variation of objective lens current. SOLUTION: A method for controlling a charged particle beam is provided to compensate an electric potential existing on a test piece. This method is provided with stages of transferring the charged particle beam on the test piece to compensate an electric potential existing on the test piece, measuring back scattered particles from the test piece to produce at least one by-product and/or imaging signal, measuring the imaging signal, varying beam energy, analyzing score by means of different beam energies, and adjusting the beam energy based on the analysis.</p> |
