| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a manufacturing method of a tripolar field-emission element using carbon nanotubes, superior in electron emission characteristics. SOLUTION: In this manufacturing method, catalyst layers 9 are formed on a cathode 2, in a state with or without forming a base layer, and carbon nanotubes 10 are grown on the catalyst layers by Spint method. On the catalyst layer 9' outside a micro cavity 6, a nonreactive layer 77 is formed, and only on the catalyst layer 9 inside the micro cavity 6, carbon nanotubes are grown. In this way, even when a separation layer 7 is etched and removed, due to the nonexistence of outside carbon nanotubes, carbon nanotubes will not flow into the micro-cavity 6. Thus, this method has an advantage of increasing production yield and reducing manufacturing cost.</p> |
