摘要 |
PROBLEM TO BE SOLVED: To provide an inspecting device for lens array, capable of measuring the optical characteristic of a lens array as a whole with high precision. SOLUTION: This inspecting device 2 for inspecting the optical characteristic of lens array 113 formed by arranging a plurality of lenses 113 in a matrix, is provided with a work holder 21 on which the lens array 113 is mounted, an optical source unit 23 for emitting a light beam to the lens array 113, a reference pattern forming unit 25 for forming a reference patter image for inspection on the basis of the light beam; an inspecting object selecting unit 27 for introducing selectively an inspecting reference pattern image to a lens which will be an object to be inspected, among a plurality of lenses of the lens array 113, and an image detecting unit 29 for detecting an inspecting reference pattern image having passed through the lens of an inspected object. By measuring the actual optical characteristic of lens forming the lens array 113, high precision of inspection of the lens array can be obtained.
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