发明名称 |
FLUID HEATER |
摘要 |
PROBLEM TO BE SOLVED: To provide a fluid heater capable of suppressing a generation of particles in a route in which a fluid to be heated flows and being used to heat a gas or the fluid in a substrate processing device of a semiconductor substrate or a liquid crystal substrate. SOLUTION: The fluid heater comprises a heating bent tube 10 formed in a tubular state of a conductive material and connected at both ends to communicate with piping in which the fluid to be heated flows, a coil 14 arranged at an outside of the bent tube and wound to surround the bent tube, and a power source 16 for supplying a high-frequency current to the coil.
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申请公布号 |
JP2001235228(A) |
申请公布日期 |
2001.08.31 |
申请号 |
JP20000047387 |
申请日期 |
2000.02.24 |
申请人 |
OMRON CORP;DAINIPPON SCREEN MFG CO LTD |
发明人 |
KATAYAMA MASAKAZU;OKU SEIJI;OJIMARU TOMONORI;MURAOKA YUSUKE |
分类号 |
H05B6/10;F24H1/10;H01L21/00;H05B6/02;(IPC1-7):F24H1/10 |
主分类号 |
H05B6/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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