HIGH-SPEED DETAILED LASER BEAM MACHINING METHOD AND ITS DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a high-speed detailed laser beam machining method and its device which make a laser beam eccentric and incident on a condensing lens and scan the condensing point on a substrate to be worked with a simple configuration. SOLUTION: The optical path from a laser oscillator 11 to a condensing lens 3 is provided with a plane glass 14 for making eccentric a laser beam 2 in the direction of X and a plane glass 15 for making eccentric in the direction of Y are provided in series, and then the laser beam is made to scan on the substrate to be worked by controlling the turning of the inclined angle of both planes glass 14 and 15.