METHOD FOR FORMING MOUNTING GROOVE ON SUBSTRATE

摘要

PURPOSE: A method for forming a mounting groove on a substrate is provided to form a large-sized LCD device by using a fluidic self assembly method. CONSTITUTION: A metal layer(152) and a photoresist layer(160) are laminated sequentially on a substrate. The photoresist layer(160) is exposed and developed by using a predetermined mask. The metal layer(152) is exposed by developing the photoresist layer(160). The first etching process for the exposed metal layer(152) is performed. The first etching process for the exposed substrate is performed to form an overhang at an edge of the etched metal layer(152). The second etching process for the metal layer(152) is performed to overetch the overhang to an inside of the etched substrate. The second etching process for the substrate is performed to form an overhang at the edge of the etched metal layer(152).