| 摘要 |
PROBLEM TO BE SOLVED: To independently check the aligment marks of a mask and work respectively separately with a CCD camera and to respectively movably set the alignment points of the mask and the alignment points of the work. SOLUTION: The exposure method for executing exposure by checking the alignment marks 6 of the mask 4 and the alignment marks 5 of the one-side substrate (work) 10 with the CCD camera 8, executing the alignment and irradiating the work with exposure rays from the mask 4 side consists is disposing the mask 4 and the one-side substrate (work) 10 in such a manner that the alignment marks 6 of the mask 4 exist on the outer side at the outer edge of the one-side substrate (work) 10 opposite to each other, and aligning the mask 4 and the one-side substrate (work) 10 by respective separately checking the alignment marks 6 and 5 of the mask 4 and the one-side substrate (work) 10 with the CCD camera 8.
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