| 摘要 |
PROBLEM TO BE SOLVED: To provide a leak inspecting device which performs a leak inspection with a simple construction, in a short time SOLUTION: The leak inspecting device wherein after the air in a master chamber 1 and in a chamber 2 containing an object 3 to be inspected with inlet and outlet holes and the like sealed is evacuated, the chambers 1, 2 are sealed, so that leak of the object to be inspected is detected by difference in pressure between the chambers 1, 2, in provided with a released flow recording unit 11 for previously recording a value corresponding to a released flow per hour of a gas contained in the object and released into the chamber 2, a gas releasing means for releasing, into the master chamber 1, a gas corresponding to the released flow recorded in the released flow recording unit 11, and a control unit 16 for comparing a determined value with a differential pressure value obtained when the master chamber 1 and the chamber 2 are sealed, following discharge of the air in the chambers, 1, 2 and a set time is clocked, and for output the result of the comparison.
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