INTEGRATED MODULAR PROCESSING PLATFORM

摘要

PROBLEM TO BE SOLVED: To need a modular vacuum processing device which can readily maintain and/or reconstruct in response to a necessity in a site and has a high throughput of a substrate in an arbitrary temporal amount. SOLUTION: There is generally provided a modular vacuum processing device, and this modular vacuum processing device contains a main frame 300 for supporting a transfer chamber 302; one or more load locks 314, 316 and one or more processing chambers 322 to 326, mounted on the transfer chamber 302; and a chamber tray 380 associated with a modular main frame piping tray 350 and a processing chamber. A substrate ordering method is also provided in a method and device for processing the substrate.