| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem due to a stage fixation part itself being vibrated by the influence of inertia or the like, when a stage starts to move and stops in the stage using a vibration actuator, the vibration causing the reading error of an encoder for detecting the current position of the stage, and hence accurate positioning being interfered. SOLUTION: The stage which uses the vibration actuator where the stage fixation part is fixed to a panel is provided. |
