| 摘要 |
PROBLEM TO BE SOLVED: To provide a local treatment device which can improve the efficiency of surface treatment by stably efficiently causing gas discharge by causing heat exchange by using a refrigerant introduced into the casing. SOLUTION: This local treatment device has an electromagnetic shielding casing member 21, a discharge tube 40 through which a process gas is made flow in the member 21, and a pair of electrodes 46 and 48 which are faced oppositely to each other on both sides of the tube 40. The treatment device also has a lead 30 which connects one electrode 46 to a high-frequency power source, and an air supply pipe 52 and an air discharge pipe 54 laid in the member 21 so that the refrigerant may be supplied into the casing member 21.
|
