POSITION SENSING METHOD, POSITION SENSOR, EXPOSURE METHOD, ALIGNER, RECORDING MEDIUM AND MANUFACTURING METHOD OF DEVICE

摘要

PROBLEM TO BE SOLVED: To sense the position of a mark formed on an object accurately and rapidly. SOLUTION: Mark information arithmetic units respectively obtain mark information on the position of a mark, such as the position of the mask estimated in every waveform, on the basis of each of an imaging signal (live waveform) obtainable by imaging the mark by an imaging unit and a differential waveform obtainable by differentiating the imaging signal by a differential arithmetic unit (steps 201 to 206). A position arithmetic unit performs a weighted arithmetic and the like on the mark information on the basis of the found mark information to detect the position of the mask (steps 207 and 208). As a result, the position of the mark can be accurately sensed according to the state of noise superposed on the imaging signal.